MadSci Network: Physics |
Dear Taylor: To answer your questions, first you should know that the pressure at the earth's surface, standard pressure, is 760 torr. A vacuum ion-pump begins to function at pressures below 10E(-2)torr. Therefore another kind of pumping must be done first to bring the vacuum chamber down to at least this pressure. When the pressure is lower than this the ion vacuum pump works as follows: A plasma is initiated in the chamber which usually contains one electrode at least made up of a reactive metal like titanium. The gas on the chamber is residual air, which contains nitrogen and oxygen. In the plasma these ions strike the titanium surface and sputter off titaniun and create titanium atoms in the plasma. The titanium ions neutralize and deposit either back on the titanium surface of on the chamber walls or any other exposed surfaces. However in striking and sticking to the wall surface the titanium atoms trap atoms of oxygen and nitrogen gas onto the surface which stick there by chemical attractive forces. As the pump operates more and more gas molecules are trapped on the exposed surfaces by this process so that the pressure in the chamber begins to fall until a very low value, where the rate of trapping and rate of release of the gas atoms come to equilibrium. Depending upon the gases, the metal used, and the plasma power level very low pressures are achieved in this manner. In the plasma the deposited titanium metal surface becomes very chemically reactive and so the gas atoms stick there very tightly. The presence of the metal atoms in the plasma is essential for the puming action to take place. The pressure of 2E(-8) torr is equal to 2E(-8)/760 fraction of one atmoshpere. R. Bersin....
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